Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
© The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journa...
| Authors: | ; ; ; |
|---|---|
| Format: | Article |
| Publication date: | 2000 |
| Country: | España |
| Institution: | Universidad Autónoma de Madrid |
| Repository: | Biblos-e Archivo. Repositorio Institucional de la UAM |
| Language: | English |
| OAI Identifier: | oai:repositorio.uam.es:10486/13950 |
| Online Access: | http://hdl.handle.net/10486/13950 https://dx.doi.org/10.1149/1.1393987 |
| Access Level: | Open access |
| Keyword: | Física Electrónica |
| _version_ | 1878732709890621440 |
|---|---|
| author | Barbadillo, L. |
| author2 | Hernández Muñoz, María Jesús Cervera Goy, Manuel Piqueras, Juan |
| author2_role | author author author |
| author_browse | Barbadillo, L. Cervera Goy, Manuel Hernández Muñoz, María Jesús Piqueras, Juan |
| author_facet | Barbadillo, L. Hernández Muñoz, María Jesús Cervera Goy, Manuel Piqueras, Juan |
| author_role | author |
| collection | Biblos-e Archivo. Repositorio Institucional de la UAM |
| description | © The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867 |
| eu_rights_str_mv | openAccess |
| format | article |
| id | ES_483ba2fb2c116ebe2bda71b080d0d795 |
| institution | Universidad Autónoma de Madrid |
| instname_str | Universidad Autónoma de Madrid |
| language | eng |
| network_acronym_str | ES |
| network_name_str | España |
| oai_identifier_str | oai:repositorio.uam.es:10486/13950 |
| publishDate | 2000 |
| publishDateSort | 2000 |
| publisher | Electrochemical Society |
| publisherStr | Electrochemical Society |
| reponame_str | Biblos-e Archivo. Repositorio Institucional de la UAM |
| spelling | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors Barbadillo, L. Hernández Muñoz, María Jesús Cervera Goy, Manuel Piqueras, Juan Física Electrónica © The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867 Electrochemical Society http://hdl.handle.net/10486/13950 https://dx.doi.org/10.1149/1.1393987 |
| spellingShingle | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors Barbadillo, L. Física Electrónica |
| title | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors |
| title_full | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors |
| title_fullStr | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors |
| title_full_unstemmed | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors |
| title_short | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors |
| title_sort | Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors |
| topic | Física Electrónica |
| topic_facet | Física Electrónica |
| url | http://hdl.handle.net/10486/13950 https://dx.doi.org/10.1149/1.1393987 |