Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors
© The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journa...
| Authors: | ; ; ; |
|---|---|
| Format: | Article |
| Publication date: | 2000 |
| Country: | España |
| Institution: | Universidad Autónoma de Madrid |
| Repository: | Biblos-e Archivo. Repositorio Institucional de la UAM |
| Language: | English |
| OAI Identifier: | oai:repositorio.uam.es:10486/13950 |
| Online Access: | http://hdl.handle.net/10486/13950 https://dx.doi.org/10.1149/1.1393987 |
| Access Level: | Open access |
| Keyword: | Física Electrónica |
| Summary: | © The Electrochemical Society, Inc. 2000. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in Journal of The Electrochemical Society. Barbadillo, L., Hernández, M. J., Cervera, M. and J. Piqueras. Amorphous CNx layers from neon electron cyclotron resonance plasmas with N2 and CH4 as precursors. Journal of The Electrochemical Society 147.10 (2000): 3864-3867 |
|---|